Hash overhead hoist transport rail system and methods of operating the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsGuancyun Li, Ching-Jung Chang, Chi-Feng Tung, Hsiang Yin Shen
Life of this patent
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Abstract
An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.
Claims20
An automated material handling system (AMHS) for a semiconductor fabrication facility (FAB), comprising:
- a network of rails;
- a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails;
- a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table;
- and
- a hash rail connected to and overlapping the turn table, wherein the hash rail is configured to rotate about the axis with the turn table, wherein the hash rail includes a first portion and a second portion each having a pi shape (π).
A method of operating an automated material handling system (AMHS), comprising:
- moving a vehicle along a first fixed rail toward a first hash rail fixed to a first turn table, the vehicle configured to hold a sample carrier that stores one or more samples;
- rotating the first hash rail about an axis extending substantially perpendicular to a surface of the first turn table;
- and
- moving the vehicle through the first hash rail from a first end of the first hash rail towards a second end of the first hash rail, the first and second ends of the first hash rail being opposite each another, wherein the first hash rail includes a first portion and a second portion each having a pi shape (π) that assists the vehicle in changing directions.
A method of operating an automated material handling system (AMHS), comprising:
- moving a vehicle along a first fixed rail toward a first hash rail fixed to a first turn table, the vehicle configured to hold a sample carrier that stores one or more samples;
- rotating the first hash rail about an axis extending substantially perpendicular to a surface of the first turn table;
- moving the vehicle along a curved portion of the hash rail;
- and
- moving the vehicle along a second fixed rail that extends in a second direction different than the first fixed rail,
- wherein the first hash rail includes a first portion and a second portion each having a pi shape (π) that assists the vehicle in changing directions, and wherein the curved portion is part of the pi shape (π).
Dependencies are inferred from the claim text.