Control device, substrate processing system, and method of controlling vacuum valve device
AssigneeTokyo Electron Limited
InventorsTakuya Yamamoto, Takashi Sugimoto
Life of this patent
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Abstract
There is a control device for controlling a vacuum valve device which includes a valve body configured to open and close a transfer path through which a first chamber and a second chamber communicate with each other, a seal member provided in the valve body, and a valve body driver having a motor and configured to drive the valve body, wherein the control device is configured to be switchable between a first operation pattern for controlling the motor at a first separation speed and a second operation pattern for controlling the motor at a second separation speed lower than the first separation speed.
Claims13
A control device for controlling a vacuum valve device which includes a valve body configured to open and close a transfer path through which a first chamber and a second chamber communicate with each other, a seal member provided in the valve body, and a valve body driver having a motor and configured to drive the valve body,
- wherein the control device is configured to be switchable between a first operation pattern for controlling the motor at a first separation speed and a second operation pattern for controlling the motor at a second separation speed lower than the first separation speed.
A method of controlling a vacuum valve device which includes a valve body configured to open and close a transfer path through which a first chamber and a second chamber communicate with each other, a seal member provided in the valve body, and a valve body driver having a motor and configured to drive the valve body, the method comprising:
- switching an operation pattern for the motor between a first operation pattern for controlling the motor at a first separation speed and a second operation pattern for controlling the motor at a second separation speed lower than the first separation speed, based on an elapsed time in a closed state of the vacuum valve device.
A method of controlling a vacuum valve device which includes a valve body configured to open and close a transfer path through which a first chamber and a second chamber communicate with each other, a seal member provided in the valve body, a valve body driver having a motor and configured to drive the valve body, and a detector configured to detect an actual rotation angle of the motor, the method comprising:
- switching an operation pattern for the motor between a first operation pattern for controlling the motor at a first separation speed and a second operation pattern for controlling the motor at a second separation speed lower than the first separation speed, based on a difference between a command signal position sent to the motor and an actual position detected by the detector,
- wherein in the second operation pattern, the motor is controlled at a higher torque than in the first operation pattern.
Dependencies are inferred from the claim text.