Transmission electron microscope high-resolution in situ fluid freezing chip

A transmission electron microscope high-resolution in situ fluid freezing chip, comprising an upper chip and a lower chip combined via a metal bonding layer, the upper chip and the lower chip each comprising a front side and a back side, the front side of the upper chip being directly bonded to the front side of the lower chip via the metal bonding layer to define an ultra-thin chamber, the upper chip and the lower chip being each made of a silicon substrate with silicon nitride or silicon oxide on two sides, the upper chip being provided with two injection ports and a first center window, wherein the lower chip is provided with a support layer, a freezing layer, an insulating layer, an opening, and a second center window;

• the freezing layer is provided with three contact electrodes, six pairs of semiconductor films, and a conductive metal film;
• the second center window is surrounded by the conductive metal film, and serves as a center of the conductive metal film;
• the three contact electrodes are disposed at an edge of the lower chip;
• one ends of the six pairs of semiconductor films are lapped on the conductive metal film, and the other ends of the six pairs of semiconductor films are lapped on the electrodes;
• in a region with the second center window as a center and beyond an outer edge of the conductive metal film, silicon is etched to form the opening, and the support layer covers the opening;
• the conductive metal film is disposed on a portion, above the opening, of the support layer;
• a portion, except a portion with the contact electrodes, of the freezing layer is covered with the insulating layer;
• and
• an area of the upper chip is slightly smaller than an area of the lower chip, the first center window of the upper chip is aligned with the second center window of the lower chip, and a plurality of holes are provided in the first center window and the second center window.