Systems and methods for uniform cooling of electromagnetic coil
AssigneeKLA Corporation
InventorsOscar Florendo, Vincent Nguyen
Life of this patent
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Abstract
A system and method for uniform cooling of an electromagnetic coil are provided. The system includes an electromagnetic coil, a cooling structure, and a cooling fluid source. The cooling structure surrounds the entirety of the perimeter of the electromagnetic coil, and includes a first cooling channel and a second cooling channel arranged alternately about the electromagnetic coil. The cooling fluid source is configured to deliver a first cooling fluid to the first cooling channel and a second cooling fluid to the second cooling channel, such that the first cooling fluid and the second cooling fluid cool the electromagnetic coil.
Claims18
A system comprising:
- an electromagnetic coil;
- a cooling structure surrounding the entirety of the perimeter of the electromagnetic coil, wherein the cooling structure comprises a first cooling channel and a second cooling channel arranged alternately about the electromagnetic coil, and wherein the first cooling channel and the second cooling channel are defined by separate tubing circuits wrapped around the entirety of the perimeter of the electromagnetic coil;
- and
- a cooling fluid source configured to deliver a first cooling fluid to the first cooling channel and a second cooling fluid to the second cooling channel, such that the first cooling fluid and the second cooling fluid cool the electromagnetic coil.
A method comprising:
- powering, via a voltage source, an electromagnetic coil;
- and
- delivering, via a cooling fluid source, a first cooling fluid and a second cooling fluid to a cooling structure surrounding the entirety of the perimeter of the electromagnetic coil;
- wherein the cooling structure comprises a first cooling channel and a second cooling channel arranged alternately about the electromagnetic coil, the first cooling fluid is delivered to the first cooling channel, and the second cooling fluid is delivered to the second cooling channel, such that the first cooling fluid and the second cooling fluid uniformly cool the electromagnetic coil, wherein the first cooling channel and the second cooling channel are defined by separate tubing circuits wrapped around the entirety of the perimeter of the electromagnetic coil.
Dependencies are inferred from the claim text.