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US 12,461,444 B2Granted
Sulfonium salt, photoacid generator, curable composition, and resist composition
AssigneeSan-Apro Ltd.
InventorsTakuto Nakao, Yuji Nakamura
Life of this patent
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Abstract
Provided are: a new sulfonium salt highly photosensitive to active energy ray, in particular, i-line or h-line; and a new photoacid generator which is highly photosensitive to i-line or h-line, and comprises a sulfonium salt that is highly soluble in a solvent and a cationically polymerizable compound such as an epoxy compound, and has excellent storage stability in the formulation. The present invention pertains to a sulfonium salt represented by general formula (1), and a photoacid generator comprising said sulfonium salt.
Claims15
A sulfonium salt represented by general formula (1) described below,
- [in formula (1), R1 and R2 each independently represent an aryl group having 6 to 14 carbon atoms, and some of hydrogen atoms in the aryl group may be substituted with a substituent (t);
- the substituent (t) represents an alkyl group having 1 to 8 carbon atoms or an aryl group having 6 to 10 carbon atoms, the substituent (t) may be bonded together directly via a single bond, or through a group represented by —SO—, —SO2—, or —CO, with R1 and R2;
- A1 and A2 each independently represent a hydrogen atom, a branched alkyl group having 3 to 7 carbon atoms, a branched alkoxy group having 3 to 7 carbon atoms, a tertiary silyl group having 3 to 9 carbon atoms, or a tertiary siloxy group having 3 to 9 carbon atoms, provided that both of A1 and A2 do not represent a hydrogen atom;
- T1 and T2 each independently represent an alkyl group having 1 to 7 carbon atoms, an alkoxy group having 1 to 7 carbon atoms, a silyl group having 3 to 9 carbon atoms, or a siloxy group having 3 to 9 carbon atoms;
- m1 and m2 each represent the number of occurrences of each of T1 and T2, m1 represents an integer of 0 to 3, m2 represents an integer of 0 to 4;
- L represents —O—, —S—, —SO—, —SO2—, or —CO;
- S represents sulfur atom, O represents oxygen atom, C represents carbon atom;
- and X− represents a monovalent polyatomic anion].
5 more elements
Dependencies are inferred from the claim text.