Torsion pump and apparatus for supplying chemical liquid

An apparatus for supplying a chemical liquid, the apparatus comprising:

• a pump configured to supply the chemical liquid to a nozzle that discharges the chemical liquid to a substrate;
• a trap tank in which the chemical liquid to be supplied from the pump to the nozzle is temporarily stored;
• a bottle containing the chemical liquid stored in the trap tank;
• a filter provided on a path through which the chemical liquid is supplied from the trap tank to the pump;
• wherein the pump includes
• a tube member having at least one hose communicating with a chemical liquid inlet and a chemical liquid outlet forming an open path from the chemical liquid inlet to the chemical liquid outlet through the at least one hose, and a cylindrical drum provided to wind the at least one hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the at least one hose wound around the drum;
• and
• a driver configured to provide a rotational force such that the at least one hose is wound around the drum,
• wherein the tube member includes
• a first flange configured to support one end of the drum;
• and
• a second flange configured to support another end of the drum,
• wherein one end of each of the at least one hose is connected to the first flange, and another end of each of the at least one hose is connected to the second flange,
• wherein the second flange is connected to the driver and rotated,
• wherein the driver further includes a compensation member configured to compensate for a vertical length deformation caused by a twisting operation of the tube member,
• wherein the compensation member includes a ball screw, and
• wherein the second flange can rotate and move up and down on the ball screw.

A torsion pump, comprising:

• a tube member having a hose communicating with a chemical liquid inlet and a chemical liquid outlet forming an open path from the chemical liquid inlet to the chemical liquid outlet through the hose, and a cylindrical drum provided to wind the hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum;
• and
• a driver configured to provide a rotational force such that the hose is wound around the drum,
• wherein the tube member includes
• a first flange configured to support one end of the drum;
• and
• a second flange configured to support another end of the drum and connected to the driver and then rotated, and
• the torsion pump further comprises a sealing case provided between the first flange and the second flange such that the drum and the hose are blocked from an external environment,
• wherein one end of the hose is connected to the first flange, and another end of the hose is connected to the second flange,
• the first flange is provided with the chemical liquid inlet, and a first inner flow path connecting the chemical liquid inlet and the one end of the hose, and
• the second flange is provided with the chemical liquid outlet, and a second inner flow path connecting the chemical liquid outlet and the another end of the hose,
• wherein the driver further includes a compensation member configured to compensate for a vertical length deformation caused by a twisting operation of the tube member,
• wherein the compensation member includes a ball screw, and
• wherein the second flange can rotate and move up and down on the ball screw.