Back to results
US 12,460,296 B2Granted
Gas diffuser housings, devices, and related methods
AssigneeEntegris, Inc.
InventorsMichael Addorisio, David McCrimmon, Virendra Warke, Devon Nichole Dion, Benjamin Schooler
Life of this patent
Estimating the term…
Abstract
Described are directional gas diffuser devices and housing components thereof; systems that include the gas diffuser devices; methods of using the gas diffuser devices; and methods of manufacturing gas diffuser devices.
Claims25
A directional gas diffuser comprising:
- an elongate housing, the housing comprising:
- an inlet end,
- a closed end,
- a length between the inlet end and the closed end,
- an opening extending along the length on a front side of the housing, and
- a channel extending between the inlet end and the closed end, the channel defined along the length by:
- the opening extending along the front side,
- an elongate back surface, and
- elongate side surfaces, wherein
- the channel has a length, a width, a depth, and a varied cross-sectional area along the channel length.
7 more elements
A directional gas diffuser comprising:
- an elongate housing, the housing comprising:
- an inlet end that comprises an inlet,
- a closed end,
- a length between the inlet end and the closed end,
- an opening extending along the length on a front face of the housing, and
- an interior channel extending between the inlet and the closed end, the channel defined along the length by:
- the opening on the front side,
- an elongate, non-porous back surface, and
- elongate non-porous side surfaces.
6 more elements
Dependencies are inferred from the claim text.