Gas recovery systems and methods
AssigneeRASIRC, Inc.
InventorJeffrey J. Spiegelman
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to gas recovery systems and methods, and systems including gas recovery systems. In some embodiments, a gas recovery system includes a gas inlet, a compressor, a buffer tank, a variable speed microturbine, one or more sensors, and a control system. A gas input into the gas inlet can be output from a processing tool, and the gas can include hydrogen or ammonia gas. The gas can be used to produce electrical power using the first variable speed microturbine. The sensor, for example, a gas analyzer, a flow meter, or a pressure sensor, can be between the gas inlet and the variable speed microturbine. The control system can be configured to control a speed of the variable speed microturbine in response to a measurement from the sensor.
Claims20
A gas recovery system, comprising:
- a gas inlet, wherein a gas input into the gas inlet comprises a gas output from a processing tool, and wherein the gas output from the processing tool comprises hydrogen or ammonia gas;
- a compressor and a buffer tank, wherein either (a) the compressor is coupled to the gas inlet and the compressor is between the gas inlet and the buffer tank, or (b) the buffer tank is coupled to the gas inlet and the buffer tank is between the gas inlet and the compressor;
- a first variable speed microturbine coupled to the buffer tank for case (a) or the compressor for case (b);
- a sensor, between the gas inlet and the first variable speed microturbine, the sensor comprising a gas analyzer, a flow meter, or a pressure sensor;
- and
- a control system coupled to the sensor and the first variable speed microturbine, wherein the control system is configured to control a first speed of the first variable speed microturbine in response to a measurement from the sensor.
A method, comprising:
- supplying a gas into a gas inlet, wherein the gas comprises a gas output from a processing tool, and wherein the gas output from the processing tool comprises hydrogen or ammonia gas;
- changing a pressure of the gas using a compressor;
- storing the gas in a buffer tank, wherein either (a) the compressor is coupled to the gas inlet and the compressor is between the gas inlet and the buffer tank, or (b) the buffer tank is coupled to the gas inlet and the buffer tank is between the gas inlet and the compressor;
- producing electrical power using a first variable speed microturbine coupled to the compressor or the buffer tank;
- measuring a property of the gas using a sensor comprising a gas analyzer, a flow meter, or a pressure sensor;
- and
- controlling, using a control system coupled to the sensor and the first variable speed microturbine, a first speed of the first variable speed microturbine in response to the measurement of the property of the gas from the sensor.
Dependencies are inferred from the claim text.