Method of ultrafast-pulsed laser deposition coupled with plasma lattice and device thereof

A method of an ultrafast-pulsed laser deposition, comprising:

• step 1:
• after splitting a femtosecond-pulsed laser beam, focalizing split femtosecond-pulsed laser beams to form a plasma channel based on a nonlinear effect and to generate a femtosecond laser filament;
• synchronizing the femtosecond-pulsed laser beam by delay synchronization processing so as to form a plasma grating or a plasma lattice by the femtosecond laser filament coupled with each other non-collinearly and crossly;
• and exciting a target material with the plasma grating or the plasma lattice;
• step 2:
• emitting multiple ultrafast-pulsed laser beams as post pulses;
• coupling the post pulses with the plasma grating or the plasma lattice sequentially, by controlling a first delay between the post pulses and the plasma grating or the plasma lattice and a second delay between the post pulses thereof, so as to form a regenerated plasma grating or a regenerated plasma lattice with multi-stage cascade in a time domain;
• and exciting the target material for multiple times;
• and
• step 3:
• exciting and ablating the target material by adjusting the ultrafast-pulsed laser beams coupled with the regenerated plasma grating or the regenerated plasma lattice, to form a thin film with a required thickness by a deposition of ablated particles on a substrate, by controlling the time.