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US 12,459,823 B2Granted
Vanadium silicon carbide film, vanadium silicon carbide film coated member, and manufacturing method of vanadium silicon carbide film coated member
AssigneeDowa Thermotech Co., Ltd.
InventorsSatoru Habuka, Hiroyuki Matsuoka
Life of this patent
Estimating the term…
Abstract
A vanadium silicon carbide film contains vanadium, silicon, and carbon, in which the total of a vanadium element concentration, a silicon element concentration, and a carbon element concentration in the film is 90 at % or more.
Claims9
A vanadium silicon carbide film, comprising
- vanadium, silicon, and carbon, wherein
- the total of a vanadium element concentration, a silicon element concentration, and a carbon element concentration in the film is 93 at % or more,
- in the film, the vanadium element concentration is 8 to 30 at %, the silicon element concentration is 8 to 30 at %, and the carbon element concentration is 40 to 80 at %,
- the vanadium silicon carbide film does not comprise nitrogen, and
- the vanadium element concentration, the silicon element concentration, and the carbon element concentration in the film satisfy (1) Expression below:
- (carbon element concentration−vanadium element concentration−silicon element concentration)≥10.0 at % (1).
3 more elements
Dependencies are inferred from the claim text.