Wafer suspension fork

A wafer suspension fork comprising:

• a body and a cover, wherein
• the body has a connection portion and two arms;
• the connection portion has a top surface, a bottom surface, and multiple inlets formed in the top surface of the connection portion;
• and
• the two arms are symmetrical in shape, are spaced from each other, and protrude from a side of the connection portion;
• each of the two arms has
• an inner surface facing to the other one of the two arms;
• an outer surface facing opposite to said the other one of the two arms;
• a holding surface defined on a top of the arm and inclining downwardly from the outer surface of the arm to the inner surface of the arm;
• a flowing surface defined on a bottom of the arm;
• multiple outer inclined holes formed in the holding surface of the arm, located near the outer surface of the arm, arranged along a protruding direction of the arm, and spaced from one another;
• each of the multiple outer inclined holes of the arm obliquely extending from the holding surface toward the flowing surface and toward the inner surface of the arm;
• multiple inner inclined holes formed in the holding surface of the arm, located near the inner surface of the arm, arranged along the protruding direction of the arm, and spaced from one another;
• each of the inner inclined holes of the arm obliquely extending from the holding surface toward the flowing surface and toward the outer surface of the arm;
• an inner flowing channel formed in the flowing surface and communicating with the multiple inner inclined holes and the multiple inlets;
• and
• an outer flowing channel formed in the flowing surface and communicating with the multiple outer inclined holes and the multiple inlets;
• and
• the cover is fixed to the bottom surface of the connection portion and the flowing surfaces of the two arms and covers the inner flowing channel and the outer flowing channel of the two arms.