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US 12,456,813 B2Granted
Helical slow-wave structures with integrated couplers of THz radiation: devices and methods of fabrication
AssigneeUNM Rainforest Innovations
InventorsFrancesca Cavallo, Divya Prakash, Daniel W. van der Weide, Max G. Lagally, Shiva Hajitabarmarznaki, Shelley S. Scott
Life of this patent
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Abstract
An antenna comprising: input and output coaxial horn antennas coupled with a self-assembled helical slow-wave structure cradled in a groove in a silicon-on-insulator wafer.
Claims5
A device comprising:
- input and output coaxial horn antennas coupled with a self-assembled helical slow-wave structure cradled in a trench in a silicon-on-insulator wafer.
Dependencies are inferred from the claim text.