US 12,456,669 B2 · Semiconductor device

Abstract

Provided is a semiconductor device capable of maintaining the flatness of a glass substrate and sufficiently protecting an end portion of the glass substrate. The semiconductor device includes a glass substrate including a first surface, a second surface opposite to the first surface, and a first side surface between the first surface and the second surface. The semiconductor device further includes wirings provided provided on the first and second surfaces, a first insulating film that covers the first surface, a second insulating film that covers the second surface, and a third insulating film that covers the first side surface, the third insulating film being continuous with at least one of the first or second insulating films.

Claims44

Dependent claims

A semiconductor device, comprising:

a glass substrate that includes:
a first surface,
a second surface opposite to the first surface, and
a first side surface between the first surface and the second surface;
a plurality of wirings that includes:
a first wiring on the first surface, and
a second wiring on the second surface;
a first insulating film that covers the first surface;
a second insulating film that covers the second surface;
a third insulating film that covers the first side surface, wherein the third insulating film is continuous with at least one of the first insulating film or the second insulating film;
a first through hole that penetrates through the glass substrate between the first surface and the second surface;
a first metal film that covers an inner wall of the first through hole;
and
a fourth insulating film inside the first metal film in the first through hole.

11 more elements

Dependencies are inferred from the claim text.

Semiconductor device

Life of this patent

Semiconductor device

Life of this patent

Abstract

Claims44