Pneumatic controlled flexure system for stabilizing a projection device
AssigneeApplied Materials, Inc.
InventorsAssaf Kidron, Jiawei Shi, Liang-Yu Chen, Che-Kai Chang, Tsu-Hui Yang, Nimrod Smith, Grant Wang, Preston Fung, Vasuman Ghanapaati Srirangarajan, Davidi Kalir, Rudolf C. Brunner
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