Optical modulator and method of manufacturing optical modulator
AssigneeSumitomo Electric Industries, Ltd.
InventorsHiroki Mori, Naoya Kono, Mitsuru Ekawa
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AssigneeSumitomo Electric Industries, Ltd.
InventorsHiroki Mori, Naoya Kono, Mitsuru Ekawa
Estimating the term…
An optical modulator includes a first mesa waveguide extending in a first direction, and a second mesa waveguide. The first mesa waveguide includes a p-type first semiconductor layer disposed over a substrate, a core layer disposed over the first semiconductor layer, a p-type second semiconductor layer disposed over the core layer, and an n-type third semiconductor layer disposed over the core layer. The second semiconductor layer and the third semiconductor layer are arranged adjacent to each other in the first direction. An electrode is disposed over the third semiconductor layer. A joining surface between the second semiconductor layer and the third semiconductor layer is inclined with respect to a surface orthogonal to the first direction.
An optical modulator comprising:
Dependencies are inferred from the claim text.