Optical comb measuring apparatus
AssigneeAdvantest Corporation
InventorTakao Sakurai
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AssigneeAdvantest Corporation
InventorTakao Sakurai
Estimating the term…
An optical comb measuring apparatus that measures an irradiation target having multiple types of measuring targets, includes: an interference signal acquiring section; and a frequency spectrum measuring section. The interference signal acquiring section acquires an interference signal between a post-irradiation signal comb obtained by irradiating the irradiation target with a pre-irradiation signal comb and a local comb set to be different from a repetition frequency of the pre-irradiation signal comb by a predetermined differential frequency. The frequency spectrum measuring section measures a frequency spectrum of a result of acquisition by the interference signal acquiring section. Either one or both of the post-irradiation signal comb and the local comb provided to the interference signal acquiring section have only components within a plurality of required bands including all of predetermined frequencies. Frequency bands of the interference signal corresponding to the plurality of respective required bands have no areas overlapping each other.
An optical comb measuring apparatus that measures an irradiation target having multiple types of measuring targets, comprising:
Dependencies are inferred from the claim text.