Infrared sensor
AssigneeHon Hai Precision Industry Co., Ltd.
InventorsKuang-Hao Chiang, Shang-Yu Chuang
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Abstract
An infrared sensor includes a substrate, an active pixel array, a reference pixel array, a light absorbing layer, a sidewall spacer, and a shading layer. The active pixel array is over the substrate. The reference pixel is over the substrate, adjacent to the active pixel array, and having a reference pixel. The reference pixel includes a platform, a resistor, and an infrared sensing material layer. The resistor is on the platform. The infrared sensing material layer is over the resistor. The light absorbing layer is over the reference pixel. The sidewall spacer is over the reference pixel and extends along a sidewall of the light absorbing layer. The shading layer is conformally formed over the light absorbing layer and the sidewall spacer.
Claims10
An infrared sensor, comprising:
- a substrate;
- an active pixel array over the substrate;
- a reference pixel array over the substrate, adjacent to the active pixel array, and having a first reference pixel, the first reference pixel comprising:
- a first platform;
- a first resistor on the first platform;
- and
- a first infrared sensing material layer over the first resistor;
- a first light absorbing layer over the first reference pixel;
- a first sidewall spacer over the first reference pixel, the first sidewall spacer laterally abutting a protruding portion of the first light absorbing layer and extending vertically along a sidewall of the protruding portion;
- and
- a first light shielding layer conformally formed over the first light absorbing layer and the first sidewall spacer.
Dependencies are inferred from the claim text.