Regenerator for foreline heating

A foreline regenerator comprising:

• a shell surrounding at least a portion of a foreline vent of a plasma-based processing system, the shell configured to provide a spacing between an outer surface of the foreline vent and an inner surface of the shell;
• a heat transfer fluid input port configured to receive heat transfer fluid and input the heat transfer fluid to the spacing;
• and
• a heat transfer fluid output port configured to output heat transfer fluid from the spacing.

A method of heating a foreline component comprising:

• receiving heat transfer fluid output from a plasma-based substrate processing chamber at an input port of a regenerator;
• flowing the heat transfer fluid between the input port of the regenerator and an output port of the regenerator to heat the foreline component, wherein flowing the heat transfer fluid comprises passing the heat transfer fluid from the input port to a regenerator shell, the regenerator shell comprising a shell that at least partially surrounds the foreline component, the shell providing a fluid path within a spacing between an outer surface of the foreline component and an inner surface of the shell;
• and
• outputting the heat transfer fluid from an output port of the regenerator.