Foreign particle removing method, formation method, article manufacturing method, foreign particle removing apparatus, and system

A foreign particle removing method of removing a foreign particle presumably on a first member including a pattern with concave and convex portions, the method comprising:

• supplying a composition on the first member;
• pressing a second member against the composition supplied on the first member to spread the composition on the first member and entrap, in the composition, the foreign particle on the first member;
• curing the composition after the pressing, in a state where the composition on the first member and the second member are in contact with each other;
• and
• separating the second member together with the composition from the first member, after the curing,
• wherein the curing controls the curing of the composition based on a cure shrinkage rate of the composition and an estimated size of the foreign particle being presumably on the first member so that a thickness of the cured composition between the second member and a convex portion of the pattern of the first member does not become smaller than the estimated size.

A foreign particle removing apparatus for removing a foreign particle presumably on a first member including a pattern with concave and convex portions, the apparatus comprising:

• a supply device configured to supply a composition on the first member;
• a holding device configured to hold and press a second member against the composition supplied on the first member;
• a curing device configured to cure the composition;
• and
• a control device configured to control
• the supply device to supply the composition on the first member;
• the holding device to press the second member against the composition supplied on the first member to spread the composition on the first member and entrap, in the composition, the foreign particle presumably on the first member;
• the curing device to cure the composition on the first member after pressing the composition, in a state where the composition and the second member are in contact with each other;
• and
• the holding device to separate the second member together with the composition from the first member, after curing the composition,
• wherein the control device controls the supply unit to control a supply amount of the composition to be supplied on the first member based on a cure shrinkage rate of the composition during curing and an estimated size of the foreign particle being presumably on the first member, so that a thickness of a portion of the cured composition existing between the second member and a convex portion of the pattern of the first member, becomes larger than the estimated size.

A foreign particle removing apparatus for removing a foreign particle on a first member including a pattern with concave and convex portions, the apparatus comprising:

• a supply device configured to supply a composition on the first member;
• a holding device configured to hold and press a second member against the composition supplied on the first member;
• a curing device configured to cure the composition;
• and
• a control device configured to control:
• the supply device to supply the composition on the first member;
• the holding device to press the second member against the composition supplied on the first member to spread the composition on the first member and entrap, in the composition, the foreign particle presumably on the first member;
• the curing device to cure the composition on the first member after pressing the composition, in a state where the composition and the second member are in contact with each other;
• and
• the holding device to separate the second member together with the composition from the first member, after curing the composition,
• wherein the control device controls the curing device to cure the composition based on a cure shrinkage rate of the composition during curing and an estimated size of the foreign particle being presumably on the first member, so that a thickness of the cured composition existing between the second member and a convex portion of the pattern of the first member does not become smaller than the estimated size.