High-power compact VUV laser-sustained plasma light source

A characterization system comprising:

• a broadband light source comprising:
• a gas containment structure containing a mixture of a first noble gas and a second noble gas;
• a filter tube positioned within the gas containment structure;
• an input optical window;
• a laser pump source configured to generate an optical pump, wherein the laser pump source is configured to direct the optical pump through the input optical window to sustain a plasma within the filter tube, wherein the plasma generates broadband light;
• wherein the first noble gas absorbs a portion of the broadband light within a first wavelength band and a second wavelength band;
• wherein the filter tube is configured to absorb a portion of the broadband light having a wavelength below a selected wavelength threshold, wherein absorption of broadband light by the first noble gas and the filter tube provide long-pass filtering of broadband light below the selected wavelength to protect one or more downstream optical elements from damage;
• an output optical window configured to transmit filtered broadband light out of the gas containment structure;
• a gas inlet;
• and
• a gas outlet, wherein the gas inlet and gas outlet are configured to generate a reverse vortex flow pattern within the filter tube;
• a set of illumination optics configured to direct filtered broadband light from the broadband light source to one or more samples;
• a set of collection optics configured to collect light emanating from the one or more samples;
• and
• a detector assembly.

A method of generating VUV broadband light comprising:

• containing a mixture of a first noble gas and a second noble gas within a gas containment structure;
• generating a reverse vortex flow pattern within a filter tube within the gas containment structure;
• generating an optical pump and directing the optical pump through an input optical window of the gas containment structure into the filter tube of the gas containment structure to sustain a plasma within the filter tube of the gas containment structure to generate broadband light;
• filtering the broadband light via the first noble gas and the filter tube to filter the broadband light having a wavelength below a selected wavelength threshold;
• and
• transmitting filtered broadband light out of the gas containment structure via an output optical window.