US 12,452,986 B2 · Nozzle apparatus

Abstract

An apparatus includes: a tube; a body including: a first body wall and a second body wall; and a support structure including: a first support portion and a second support portion. The first body wall extends in a first direction, the second body wall extends in a second direction that is different than the first direction, a first portion of the tube passes through an opening in the second body wall the first support portion is configured to attach to the first body wall, and a second portion of the tube is configured to pass through the second support portion when the first support portion is attached to the first body wall. An interior of the tube and an interior of the body are configured to receive molten target material, and the target material emits extreme ultraviolet (EUV) light when in a plasma state.

Claims21

Dependent claims

An apparatus for an extreme ultraviolet light source, the apparatus comprising:

a tube comprising a side wall having a length that extends from a first end to a second end;
an actuator mechanically coupled to an exterior of the side wall;
a body comprising:
a first body wall, and a second body wall;
and
a fitting disposed at an end of the body, the fitting comprising a passage, wherein a first portion of the side wall is held at an opening in the second body wall, a second portion of the side wall is disposed in the passage, the actuator is between the fitting and the second end of the tube, and at least half of the length of the side wall is surrounded by the first body wall in an interior region configured to be fluidly coupled to a reservoir of target material.

3 more elements

Dependencies are inferred from the claim text.

Nozzle apparatus

Life of this patent

Nozzle apparatus

Life of this patent

Abstract

Claims21