Ceramic structure and wafer system
AssigneeKYOCERA Corporation
InventorsYasunori Kawanabe, Takeshi Muneishi, Yoshihiro Komatsu, Yoshihiro Okawa
Life of this patent
Estimating the term…
Abstract
A heater includes a base, a resistive heating body, and a terminal portion. The base is formed of ceramic and has a plate shape. The resistive heating body is located in the base. The terminal portion is electrically connected to the resistive heating body. The base includes a protruding portion surrounding the terminal portion, on a lower surface side. The protruding portion is formed of a ceramic member, and the terminal portion passes through a through hole formed in the ceramic member. The ceramic member is bonded to at least one of the lower surface of the base or the terminal portion.
Claims20
A ceramic structure comprising:
- a base formed of ceramic and having a plate shape, the base comprising an upper surface on which a wafer is superposed and a lower surface opposite to the upper surface;
- an internal conductor located in the base;
- a protruding portion formed on the lower surface of the base;
- a terminal portion electrically connected to the internal conductor, at least partly located in the base and in the protruding portion, and exposed to an outside of the protruding portion;
- and
- a pipe extending from the lower surface, wherein
- the protruding portion is formed of a ceramic member,
- the terminal portion passes through a through hole formed in the ceramic member,
- the protruding portion includes a top surface and a side surface connected to the top surface,
- the top surface is located farther away from the upper surface than the lower surface, and
- the ceramic member is bonded to at least one of the lower surface of the base and the terminal portion and is located inside the pipe.
A ceramic structure comprising:
- a base formed of ceramic and having a plate shape, the base comprising an upper surface on which a wafer is superposed and a lower surface opposite to the upper surface;
- an internal conductor located in the base;
- a protruding portion formed on the lower surface of the base;
- and
- a terminal portion electrically connected to the internal conductor, at least partly located in the base and in the protruding portion, and exposed to outside the protruding portion, wherein
- the protruding portion is formed of a ceramic member,
- the terminal portion passes through a through hole formed in the ceramic member, and
- the ceramic member is bonded to at least one of the lower surface of the base and the terminal portion, wherein
- the protruding portion has a contour of any one of a circle, an ellipse, and a polygon in a cross-section parallel to the lower surface, wherein
- when a line segment formed of a virtual straight line is drawn on the contour and inside the contour, a maximum value of a length of the line segment is greater than a thickness of the protruding portion, wherein
- the ceramic member comprises a recessed portion around the through hole at the top surface of the protruding portion.
Dependencies are inferred from the claim text.