Bonded assembly including interconnect-level bonding pads and methods of forming the same
AssigneeSanDisk Technologies LLC
InventorsKensuke Ishikawa, Shingo Totani, Fumitaka Amano, Rahul Sharangpani
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Abstract
A bonded assembly includes a first semiconductor die that includes first metallic bonding structures embedded within a first bonding-level dielectric layer, and a second semiconductor die that includes second metallic bonding structures embedded within a second bonding-level dielectric layer and bonded to the first metallic bonding structures by metal-to-metal bonding. One of the first metallic bonding structures a pad portion, and a via portion located between the pad portion and a first semiconductor device in the first semiconductor die, the via portion having second tapered sidewalls.
Claims20
A bonded assembly, comprising:
- a first semiconductor die that comprises first semiconductor devices, first interconnect-level dielectric material layers embedding first metal interconnect structures, and first metallic bonding structures embedded within a first bonding-level dielectric layer;
- and
- a second semiconductor die that comprises second semiconductor devices, second interconnect-level dielectric material layers embedding second metal interconnect structures, and second metallic bonding structures embedded within a second bonding-level dielectric layer and bonded to the first metallic bonding structures by metal-to-metal bonding,
- wherein one of the first metallic bonding structures comprises:
- a pad portion;
- and
- a via portion located between the pad portion and the first semiconductor device, the via portion having second tapered sidewalls.
A method of forming a bonded assembly, comprising:
- forming a first semiconductor die, wherein the first semiconductor die comprises first semiconductor devices, first interconnect-level dielectric material layers embedding first metal interconnect structures, and first metallic bonding structures embedded within a first bonding-level dielectric layer, wherein one of the first metallic bonding structures comprises:
- first tapered sidewalls that are laterally spaced apart along a first horizontal direction, laterally extending along a second horizontal direction, and having a first taper angle with respect to a vertical direction;
- and
- second tapered sidewalls that are laterally spaced apart along the first horizontal direction, laterally extending along the second horizontal direction, having top edges located within a horizontal plane including bottom edges of the first tapered sidewalls, and having a second taper angle with respect to the vertical direction,
- and wherein the second taper angle is greater than the first taper angle at by least a factor of 3, and is in a range from 25 degrees to 55 degrees;
- providing a second semiconductor die, the second semiconductor die comprising second semiconductor devices, second interconnect-level dielectric material layers embedding second metal interconnect structures, and second metallic bonding structures embedded within a second;
- and
- bonding the second metallic bonding structures to the first metallic bonding structures.
Dependencies are inferred from the claim text.