Dividing method of workpiece
AssigneeDisco Corporation
InventorsYohei Masuda, Yoshinori Kakinuma, Makoto Saito, Kazuki Sugiura
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AssigneeDisco Corporation
InventorsYohei Masuda, Yoshinori Kakinuma, Makoto Saito, Kazuki Sugiura
Estimating the term…
A tape is stuck to the front surface of a workpiece in such a manner that the direction in which the stretch rate becomes the lowest when a predetermined force is applied to the tape is non-parallel to each of multiple planned dividing lines extending in a lattice manner. In this case, each of the multiple planned dividing lines does not extend along the direction perpendicular to this direction. This can reduce the ratio of the region to which the tape does not stick in the front surface of the workpiece in the vicinity of the boundary between each of the multiple planned dividing lines and a region in which a device is formed and suppress deterioration of the processing quality when the workpiece is divided from the back surface side by a cutting blade.
A dividing method of a workpiece, in which the workpiece that is segmented into a plurality of regions by a plurality of first planned dividing lines each extending along a first direction and a plurality of second planned dividing lines each extending along a second direction intersecting the first dividing lines extending in the first direction, the workpiece having a device formed on a side of a front surface of each of the plurality of regions is divided by a cutting blade from a back surface of the workpiece along each of the plurality of first planned dividing lines and each of the plurality of second planned dividing lines, the dividing method comprising:
Dependencies are inferred from the claim text.