Remote control devices for probe systems, probe systems that include the remote control devices, and methods of remotely operating a motorized positioner of a probe system

A probe system, comprising:

• a chuck that defines a support surface configured to support a substrate that includes a device under test (DUT);
• a signal generation and analysis assembly configured to at least one of generate a test signal and analyze a resultant signal;
• a probe configured to at least one of provide the test signal to the DUT and receive the resultant signal from the DUT;
• a motorized positioner configured to selectively translate the probe, relative to the support surface, in three dimensions and along three axes;
• a remote control device that includes:
• (i) a first rotary encoder including a first encoder shaft and a first rotary knob that is attached to the first encoder shaft and configured to be gripped by a user of the remote control device during rotation of the first encoder shaft, wherein the first rotary encoder is configured to generate a first encoder signal indicative of rotation of the first encoder shaft;
• (ii) a second rotary encoder including a second encoder shaft and a second rotary knob that is attached to the second encoder shaft and configured to be gripped by a user of the remote control device during rotation of the second encoder shaft, wherein the second rotary encoder is configured to generate a second encoder signal indicative of rotation of the second encoder shaft;
• (iii) a third rotary encoder including a third encoder shaft and a third rotary knob that is attached to the third encoder shaft and configured to be gripped by a user of the remote control device during rotation of the third encoder shaft, wherein the third rotary encoder is configured to generate a third encoder signal indicative of rotation of the third encoder shaft;
• and
• (iv) a remote processing device configured to receive the first encoder signal, the second encoder signal, and the third encoder signal, to generate a control signal that is indicative of the first encoder signal, the second encoder signal, and the third encoder signal, and to transmit the control signal to the motorized positioner of the probe system;
• and
• a local processing device configured to receive the control signal from the remote processing device and to control the operation of the motorized positioner based, at least in part, on the control signal.

A method of remotely operating a motorized positioner of a probe system, wherein the probe system is configured to test a device under test (DUT) that is formed on a substrate, wherein the probe system includes a chuck that defines a support surface configured to support the substrate, and further wherein the motorized positioner is configured to selectively translate a probe relative to the support surface and along three axes, the method comprising:

• generating a control signal utilizing a remote control device that includes:
• (i) a first rotary encoder including a first encoder shaft and a first rotary knob that is attached to the first encoder shaft and configured to be gripped by a user of the remote control device during rotation of the first encoder shaft, wherein the first rotary encoder is configured to generate a first encoder signal indicative of rotation of the first encoder shaft;
• (ii) a second rotary encoder including a second encoder shaft and a second rotary knob that is attached to the second encoder shaft and configured to be gripped by a user of the remote control device during rotation of the second encoder shaft, wherein the second rotary encoder is configured to generate a second encoder signal indicative of rotation of the second encoder shaft;
• (iii) a third rotary encoder including a third encoder shaft and a third rotary knob that is attached to the third encoder shaft and configured to be gripped by a user of the remote control device during rotation of the third encoder shaft, wherein the third rotary encoder is configured to generate a third encoder signal indicative of rotation of the third encoder shaft;
• and
• (iv) a remote processing device configured to receive the first encoder signal, the second encoder signal, and the third encoder signal, to generate a control signal that is indicative of the first encoder signal, the second encoder signal, and the third encoder signal, and to transmit the control signal to the motorized positioner of the probe system;
• transmitting the control signal to the probe system;
• and
• translating the probe of the probe system relative to the support surface of the probe system, wherein the translating is based, at least in part, on the control signal.

A remote control device for a motorized positioner of a probe system, wherein the probe system is configured to test a device under test (DUT) that is formed on a substrate, wherein the probe system includes a chuck that defines a support surface configured to support the substrate, and further wherein the motorized positioner is configured to selectively translate a probe relative to the support surface and along three axes, the remote control device comprising:

• a first rotary encoder including a first encoder shaft, wherein the first rotary encoder is configured to generate a first encoder signal indicative of rotation of the first encoder shaft;
• a second rotary encoder including a second encoder shaft, wherein the second rotary encoder is configured to generate a second encoder signal indicative of rotation of the second encoder shaft;
• a third rotary encoder including a third encoder shaft, wherein the third rotary encoder is configured to generate a third encoder signal indicative of rotation of the third encoder shaft;
• a remote processing device configured to receive the first encoder signal, the second encoder signal, and the third encoder signal, to generate a control signal that is indicative of the first encoder signal, the second encoder signal, and the third encoder signal, and to transmit the control signal to the motorized positioner of the probe system;
• and
• an interlock actuator, wherein the interlock actuator is configured to selectively generate an interlock signal responsive to actuation of the interlock actuator by a user of the remote control device.

A probe system, comprising:

• a chuck that defines a support surface configured to support a substrate that includes a device under test (DUT);
• a signal generation and analysis assembly configured to at least one of generate a test signal and analyze a resultant signal;
• a probe configured to at least one of provide the test signal to the DUT and receive the resultant signal from the DUT;
• a motorized positioner configured to selectively translate the probe, relative to the support surface, in three dimensions and along three axes;
• a remote control device that includes:
• (i) a first rotary encoder including a first encoder shaft, wherein the first rotary encoder is configured to generate a first encoder signal indicative of rotation of the first encoder shaft;
• (ii) a second rotary encoder including a second encoder shaft, wherein the second rotary encoder is configured to generate a second encoder signal indicative of rotation of the second encoder shaft;
• (iii) a third rotary encoder including a third encoder shaft, wherein the third rotary encoder is configured to generate a third encoder signal indicative of rotation of the third encoder shaft;
• (iv) a remote processing device configured to receive the first encoder signal, the second encoder signal, and the third encoder signal, to generate a control signal that is indicative of the first encoder signal, the second encoder signal, and the third encoder signal, and to transmit the control signal to the motorized positioner of the probe system;
• and
• (v) an interlock actuator, wherein the interlock actuator is configured to selectively generate an interlock signal responsive to actuation of the interlock actuator by a user of the remote control device;
• and
• a local processing device configured to receive the control signal from the remote processing device and to control the operation of the motorized positioner based, at least in part, on the control signal.

A method of remotely operating a motorized positioner of a probe system, wherein the probe system is configured to test a device under test (DUT) that is formed on a substrate, wherein the probe system includes a chuck that defines a support surface configured to support the substrate, and further wherein the motorized positioner is configured to selectively translate a probe relative to the support surface and along three axes, the method comprising:

• generating a control signal utilizing a remote control device that includes:
• (i) a first rotary encoder including a first encoder shaft, wherein the first rotary encoder is configured to generate a first encoder signal indicative of rotation of the first encoder shaft;
• (ii) a second rotary encoder including a second encoder shaft, wherein the second rotary encoder is configured to generate a second encoder signal indicative of rotation of the second encoder shaft;
• (iii) a third rotary encoder including a third encoder shaft, wherein the third rotary encoder is configured to generate a third encoder signal indicative of rotation of the third encoder shaft;
• and
• (iv) a remote processing device configured to receive the first encoder signal, the second encoder signal, and the third encoder signal, to generate a control signal that is indicative of the first encoder signal, the second encoder signal, and the third encoder signal, and to transmit the control signal to the motorized positioner of the probe system;
• transmitting the control signal to the probe system;
• and
• translating the probe of the probe system relative to the support surface of the probe system, wherein the translating is based, at least in part, on the control signal;
• wherein the probe system includes a translation interlock configured to restrict motion of the probe in a direction that is parallel to the support surface when a distance between the probe and a device under test (DUT) is less than a threshold distance, and further wherein, prior to the translating, the method includes receiving an interlock signal from an interlock actuator of the remote control device, wherein the receiving includes defeating the translation interlock and permitting motion of the probe in the direction that is parallel to the support surface when the distance between the probe and the DUT is less than the threshold distance.