MEMS gas sensor and array thereof, and gas detection and preparation method

A Micro-Electro-Mechanical System (MEMS) gas sensor, comprising:

• a first base substrate with a first surface on which a cavity is provided, and a gas detection component disposed at an opening of the cavity, wherein
• the gas detection component comprises:
• a strip-shaped support suspension bridge erected at a first edge and a second edge of the opening of the cavity, wherein a strip-shaped support suspension bridge has a strip-shaped support bridge structure, and a gas detection part disposed on a side of the strip-shaped support suspension bridge away from the cavity, wherein the gas detection part comprises a strip-shaped heating electrode part, an insulation layer, a strip-shaped detection electrode part, and a gas sensitive material part, that are stacked sequentially, the strip-shaped detection electrode part comprises a first detection electrode part and a second detection electrode part, a first opening is provided between the first detection electrode part and the second detection electrode part, the gas sensitive material part is provided at a position of the first opening, a first end of the gas sensitive material part is connected with the first detection electrode part, and a second end of the gas sensitive material part is connected with the second detection electrode part;
• wherein the MEMS gas sensor further comprises:
• a heating electrode pin, a first ground pin, a detection electrode pin, and a second ground pin, that are disposed on the first base substrate, wherein
• the heating electrode pin is connected with a first end of the strip-shaped heating electrode part, and a second end of the strip-shaped heating electrode part is connected with the first ground pin;
• a first end of the first detection electrode part is connected with the first end of the gas sensitive material part, and a second end of the first detection electrode part is connected with the detection electrode pin;
• and
• a first end of the second detection electrode part is connected with the second end of the gas sensitive material part, and a second end of the second detection electrode part is connected with the second ground pin;
• wherein the cavity comprises more cavities, multiple gas detection components at a cavity opening of any one cavity share a pin, or multiple gas detection components at cavity openings of any multiple cavities share a pin;
• wherein the multiple gas detection components sharing a pin, comprises:
• strip-shaped detection electrode parts of the multiple gas detection components share the detection electrode pin.