Metal member with insulating film, physical quantity sensor, and pressure sensor
AssigneeTDK Corporation
InventorsMasanori Kobayashi, Ken Unno, Tetsuya Sasahara, Kohei Nawaoka
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AssigneeTDK Corporation
InventorsMasanori Kobayashi, Ken Unno, Tetsuya Sasahara, Kohei Nawaoka
Estimating the term…
A metal member with insulating film includes a metal member, an insulating film, and a reinforcement portion. The metal member includes a film formation surface and a connection surface facing in a different direction from the film formation surface and connecting to the film formation surface. The insulating film covers at least a part of the film formation surface and the connection surface over a connection position between the film formation surface and the connection surface. The reinforcement portion is formed along a periphery of the insulating film at the connection position and covers at least a part of the periphery of the insulating film from an opposite side to the metal member.
A metal member with insulating film comprising:
Dependencies are inferred from the claim text.