Vacuum pump and control apparatus of vacuum pump with water leakage prevention between the pump main body and control apparatus
AssigneeEdwards Japan Limited
InventorKengo Saegusa
Life of this patent
Estimating the term…
Abstract
A vacuum pump in which a pump main body and a control apparatus that controls the pump main body are integrated with each other. The control apparatus includes a cylindrical portion which protrudes from a chassis of the control apparatus and inside which a cable that connects the pump main body and the control apparatus to each other is passed. A height of the cylindrical portion exceeds a height of a gap formed between a bottom portion of the pump main body and the chassis of the control apparatus.
Claims10
A vacuum pump in which a pump main body and a control apparatus that controls the pump main body are integrated with each other, wherein
- the pump main body includes a hermetic connector having a plurality of pins,
- a relay substrate is connected to the plurality of pins,
- the relay substrate is connected to the control apparatus by a cable,
- the control apparatus includes a cylindrical portion which protrudes from a chassis of the control apparatus through a hole in a bottom portion of the pump main body wherein the cable passes from the control apparatus into both the cylindrical portion and the hole, and wherein the hermetic connector is above an entirety of the cylindrical portion and the cable is loose of the cylindrical portion,
- a height of the cylindrical portion exceeds a height of a gap formed between the bottom portion of the pump main body and the chassis of the control apparatus, and
- the cylindrical portion comprises a hollow plate-like portion configured to prevent water droplets from infiltrating into the control apparatus.
Dependencies are inferred from the claim text.