Method for removing metal compound
AssigneeResonac Corporation
InventorKazuma Matsui
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Abstract
A method for removing a metal compound capable of selectively removing an oxide of a metal, a nitride of a metal, or an oxynitride of a metal while suppressing the removal of silicon dioxide, silicon nitride, polysilicon, a simple substance of a metal, or the like. The method includes bringing at least one metal compound selected from oxides of a metal, nitrides of a metal, and oxynitrides of a metal into contact with a treatment liquid to remove it from a treatment object. The metal is at least one selected from tungsten, cobalt, nickel, tantalum, titanium, iron, copper, and molybdenum. The treatment liquid is an aqueous solution containing at least one compound for removal selected from carboxylic acids and salts thereof and contains the compound(s) for removal at a total concentration of 2 mass % or more.
Claims17
A method for removing a metal compound, comprising bringing at least one metal compound selected from oxides of a metal, nitrides of a metal, and oxynitrides of a metal into contact with a treatment liquid to remove the metal compound from a treatment object, wherein:
- the metal is at least one selected from tungsten, cobalt, nickel, tantalum, titanium, iron, and molybdenum,
- the treatment liquid is an aqueous solution consisting of water and at least one compound for removal selected from carboxylic acids and salts of the carboxylic acids, and
- the treatment liquid contains the at least one compound for removal at a total concentration of 2 mass % or more.
Dependencies are inferred from the claim text.