Micro-device structures with etch holes
AssigneeX-Celeprint Limited
InventorPierluigi Rubino
Life of this patent
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Abstract
A micro-device structure comprises a source substrate having a sacrificial layer comprising a sacrificial portion adjacent to an anchor portion, a micro-device disposed completely over the sacrificial portion, the micro-device having a top side opposite the sacrificial portion and a bottom side adjacent to the sacrificial portion and comprising an etch hole that extends through the micro-device from the top side to the bottom side, and a tether that physically connects the micro-device to the anchor portion. A micro-device structure comprises a micro-device disposed on a target substrate. Micro-devices can be any one or more of an antenna, a micro-heater, a power device, a MEMs device, and a micro-fluidic reservoir.
Claims8
A micro-device structure, comprising:
- a target substrate;
- a micro-device disposed on or over the target substrate, the micro-device (i) having a top side and a bottom side opposite the top side and adjacent to the target substrate and (ii) comprising an etch hole that extends through the micro-device from the top side to the bottom side;
- and
- at least a portion of a broken or separated tether physically connected to the micro-device,
- wherein the micro-device is non-native to the target substrate and the tether is external to the micro-device and the etch hole.
A micro-device structure, comprising:
- a target substrate;
- a micro-device disposed on or over the target substrate, the micro-device (i) having a top side and a bottom side opposite the top side and adjacent to the target substrate and (ii) comprising an etch hole that extends through the micro-device from the top side to the bottom side;
- and
- at least a portion of a broken or separated tether physically connected to the micro-device,
- wherein the micro-device has a crystalline structure and a micro-device edge direction is oriented at an angle from 30 to 60 degrees with respect to a {110} crystal plane of the crystalline structure.
A micro-device structure, comprising:
- a target substrate;
- a micro-device disposed on or over the target substrate, the micro-device (i) having a top side and a bottom side opposite the top side and adjacent to the target substrate and (ii) comprising an etch hole that extends through the micro-device from the top side to the bottom side;
- and
- at least a portion of a broken or separated tether physically connected to the micro-device,
- wherein the etch hole is rectangular and has an etch-hole width, the tether has a tether width, and the etch-hole width is no less than the tether width.
Dependencies are inferred from the claim text.