Multisensor MEMS and/or NEMS measurement system

A method for measuring a physical quantity comprising the steps of:

• A emitting a plurality of N light beams each having an emission wavelength λi,
• B modulating each of the N light beams indexed i, at an associated modulation frequency fmod(i), indexed i, generating N modulated light beams,
• C superposing the N modulated light beams to form an input beam and to inject the input beam as input to the resonant assembly, the modulation device being arranged upstream of the injection device,
• the resonant assembly comprising:
• an input and an output,
• a plurality of N optical resonators Ri indexed i each having a resonance wavelength λr,i, the wavelength λi being in the resonance band of the associated optical resonator Ri,
• at least one waveguide to which the optical resonators are coupled,
• at least one element coupled to each resonator Ri,
• D modifying an optical transmission or reflection as a function of wavelength, for wavelengths close to the resonance wavelength λr,i of each optical resonator Ri, said modification being dependent on the physical quantity to be measured,
• E detecting a light beam at the output of the resonant assembly and generating an output signal,
• F synchronously demodulating the output signal, based on at least N synchronous-detection demodulation modules, so as to extract characteristic signals associated with each element and the measured values of said physical quantity being measured from the characteristic signals.

A MEMs or NEMs measurement system comprising:

• a resonant assembly comprising:
• an input and an output,
• a plurality of N optical resonators Ri indexed i each having a resonance wavelength λr,i,
• at least one waveguide to which the optical resonators are coupled,
• at least one element coupled to each resonator Ri and configured to modify an optical transmission or reflection as a function of wavelength, for wavelengths close to the resonance wavelength λr,i of said optical resonator Ri, said modification being dependent on a physical quantity to be measured,
• an emission device configured to emit a plurality of N light beams indexed i, each having an emission wavelength λi indexed i in the resonance band of the associated optical resonator Ri indexed i,
• an injection device configured to superpose the N light beams to form an input beam and to inject the input beam as input to the resonant assembly,
• a modulation device, arranged downstream of an output of the resonant assembly, and
• configured to modulate each of the N light beams indexed i, having an emission wavelength λi indexed i, a at an associated modulation frequency fmod (i) indexed i, generating N modulated light beams,
• at least one detector configured to detect an output light beam at an output of the modulation device and to generate an output signal,
• a demodulation device comprising at least N synchronous-detection demodulation modules, denoted LIA, to demodulate the output signal, so as to extract characteristic signals associated with each element, measured values of said physical quantity being measured from said characteristic signals.