Liquid supply system and liquid preparation method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFang-Pin Chiang, Chi-Tung Lai, Heng-Yi Tseng
Life of this patent
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Abstract
A liquid preparation method is provided. The method includes measuring, with a detection member, a quantity of a liquid stored in a liquid tank by emitting a detection signal toward a floating member positioned in a tube. The tube extends in a height direction of the liquid tank and fluidly connects to two connecting ports of the liquid tank that are located at opposite sides of a surface of the liquid, and the position of the floating member in the tube varies according to a level of the liquid in the liquid tank. The method also includes regulating the liquid in the liquid tank in response to the quantity of the liquid in the liquid tank.
Claims20
A liquid preparation method in a liquid supply system, comprising:
- supplying a liquid from a liquid tank to a processing tool in which a wafer is located;
- measuring, with a detection member, a quantity of the liquid stored in the liquid tank by emitting a detection signal toward a floating member positioned in a tube, wherein the tube extends in a height direction of the liquid tank and fluidly connects to two connecting ports of the liquid tank that are located at opposite sides of a surface of the liquid, and the position of the floating member in the tube varies according to a level of the liquid in the liquid tank;
- and
- regulating the liquid in the liquid tank in response to the quantity of the liquid in the liquid tank,
- wherein the detection signal is transmitted to the tube via an upper connecting line that connects an upper end of the tube to the liquid tank, and the detection signal from the detection member in the upper connecting line travels along a longitudinal direction of the tube.
A liquid preparation method in a liquid supply system, comprising:
- supplying a liquid from a liquid tank to a processing tool through a discharging piping;
- determining whether an abnormal of the supplying of the liquid occurs by measuring a height of chemical liquid in a tube which is connected to the liquid tank, wherein the measurement of the height of chemical liquid comprises:
- emitting, by a signal source, a detection signal toward a floating member which is positioned in the tube that positioned outside of the liquid tank;
- and
- calculating a time interval (Δt) between a first time point (t1) when the detection signal is generated by the signal source and a second time point (t2) when a signal receiver receives the detection signal reflected from the floating member, wherein when the time interval (Δt) is greater than a predetermined value, a controller determines the abnormality occurs.
A liquid preparation method in a liquid supply system, comprising:
- preparing a liquid mixture by the following operations:
- supplying a liquid tank with a first type of liquid;
- measuring, with a detection member, the amount of the first type of liquid filled into the liquid tank by emitting a detection signal toward a floating member positioned in a tube, wherein the tube extends in a height direction of the liquid tank and fluidly connects to two connecting ports of the liquid tank that are located at opposite sides of a surface of the liquid mixture, and the position of the floating member in the tube varies according to a level of the liquid mixture in the liquid tank;
- and
- stopping the supply of the first type of liquid when the amount of the first type of liquid filled into the liquid tank reaches a first desired amount;
- and
- supplying the liquid mixture in the liquid tank to a processing tool for processing a semiconductor wafer after the preparation of the liquid mixture,
- wherein the preparation of the liquid mixture further comprises:
- supplying the liquid tank with a second type of liquid;
- measuring, with the detection member, the amount of the second type of liquid filled into the liquid tank;
- stopping the supply of the second type of liquid when the amount of the second type of liquid filled into the liquid tank reaches a second desired amount;
- and
- blending the first type of liquid and the second type of liquid in the liquid tank.
Dependencies are inferred from the claim text.