Fixture to be used in PVD processes for cylindrical, elongated substrates
AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorsSebastian Nahen, Francesco Macri, Rudolf Meiler
Life of this patent
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Abstract
A fixture system to be used in a vacuum chamber (16) of a vacuum treatment system, comprising, a spindle (1), a gear wheel, in this text referred to as sun wheel (2), a cylindrical object exhibiting properties that allow the gear wheel to mesh into it, in order to rotate said cylindrical object, in this text referred to as reel (3), a holding plate (4), wherein the sun wheel (2) and the reel (3) are manufactured in order to allow the sun wheel (2) to mesh into the reel (3), thereby rotating it.
Claims12
A fixture system to be used in a vacuum chamber of a vacuum treatment system, comprising:
- a spindle,
- at least one gear wheel,
- at least one reel, wherein the at least one reel is a cylindrical object exhibiting properties that allow the at least one gear wheel to mesh into the at least one reel, in order to rotate said at least one reel,
- at least one holding plate,
- wherein the at least one holding plate is mounted to the spindle, the at least one gear wheel is rotatably mounted to the spindle and during operation interlocked externally, so that the spindle does not rotate the at least one gear wheel, and the at least one reel is mounted to the at least one holding plate, and a work piece holder is mounted to the at least one reel, and
- the at least one holding plate comprises a central part, which lies in a plane,
- wherein a normal of the plane is parallel to a rotation axis of the spindle, wherein the at least one holding plate comprises at least one arm that extends in a longitudinal arm direction, wherein the at least one arm is attached to the central part and wherein the longitudinal arm direction extends radially outwards from the central part, wherein the at least one arm lies in the plane,
- wherein the at least one holding plate comprises at least one hand that extends in a longitudinal hand direction, wherein the at least one hand is attached to the at least one arm and wherein the longitudinal hand direction exhibits an angle between 50° and 130° with reference to the longitudinal arm direction, wherein the longitudinal hand direction exhibits an inclination of about 20° to 70° with reference to the normal direction of the plane, wherein the at least one reel is mounted to the at least one hand, and
- the at least one gear wheel and the at least one reel are manufactured in order to allow the at least one gear wheel to mesh into the at least one reel, thereby rotating the at least one reel,
- wherein in operation, an axis of the reel does not intersect a line of rotation of the gear wheel.
A fixture system to be used in a vacuum chamber of a vacuum treatment system comprising:
- a spindle, a gear wheel, a cylindrical object exhibiting properties that allow the gear wheel to mesh to the cylindrical object in order to rotate said cylindrical object,
- wherein the system is designed to have the gear wheel rotate said cylindrical object around an axis that represents a line that is arranged in an inclined manner relative to a line of rotation of the gear wheel and that in operation does not intersect the line of rotation of the gear wheel.
Dependencies are inferred from the claim text.