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US 12,444,901 B2Granted
Seed laser system for radiation source
AssigneeASML Netherlands B.V.
InventorsRostislav Rokitski, Philip M. Conklin, Cory Alan Stinson, Alexander Anthony Schafgans, Christoffel Johannes Liebenberg
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Abstract
Systems, apparatuses, and methods are provided for dual-pass amplification of laser beams along a common beam path. An example method can include generating a first laser beam and a second laser beam. Subsequently, the example method can include performing dual-pass amplification of the first laser beam and the second laser beam along a common beam path. In some aspects, the first laser beam can include a first wavelength, the second laser beam can include a second wavelength different from the first wavelength.
Claims18
A radiation source, comprising:
- a laser system comprising:
- a first laser source configured to generate a first laser beam;
- a second laser source configured to generate a second laser beam;
- a dual-pass amplifier configured to:
- perform dual-pass amplification of the first laser beam along a common beam path;
- and
- perform dual-pass amplification of the second laser beam along the common beam path;
- and
- an acousto-optic modulator disposed along the common beam path, the acousto-optic modulator being configured to:
- receive the first laser beam from the dual-pass amplifier along the common beam path;
- receive the second laser beam from the dual-pass amplifier along the common beam path;
- generate a modified first laser beam based on a first wavelength of the first laser beam;
- generate a modified second laser beam based on a second wavelength of the second laser beam;
- output the modified first laser beam to the dual-pass amplifier along the common beam path;
- and
- output the modified second laser beam to the dual-pass amplifier along the common beam path,
- the dual-pass amplifier being further configured to:
- perform the dual-pass amplification of the first laser beam based on:
- a first amplification of the first laser beam;
- and
- a second amplification of the modified first laser beam;
- and
- perform the dual-pass amplification of the second laser beam based on:
- a third amplification of the second laser beam;
- and
- a fourth amplification of the modified second laser beam.
23 more elements
An apparatus, comprising:
- a first laser source configured to generate a first laser beam;
- a second laser source configured to generate a second laser beam;
- a dual-pass amplifier configured to:
- perform dual-pass amplification of the first laser beam along a common beam path;
- and
- perform dual-pass amplification of the second laser beam along the common beam path;
- and
- an acousto-optic modulator disposed along the common beam path, the acousto-optic modulator being configured to:
- receive the first laser beam from the dual-pass amplifier along the common beam path;
- receive the second laser beam from the dual-pass amplifier along the common beam path;
- generate a modified first laser beam based on a first wavelength of the first laser beam;
- generate a modified second laser beam based on a second wavelength of the second laser beam;
- output the modified first laser beam to the dual-pass amplifier along the common beam path;
- and
- output the modified second laser beam to the dual-pass amplifier along the common beam path,
- the dual-pass amplifier being further configured to:
- perform the dual-pass amplification of the first laser beam based on:
- a first amplification of the first laser beam;
- and
- a second amplification of the modified first laser beam;
- and
- perform the dual-pass amplification of the second laser beam based on:
- a third amplification of the second laser beam;
- and
- a fourth amplification of the modified second laser beam.
22 more elements
A method, comprising:
- generating, by a first laser source, a first laser beam;
- generating, by a second laser source, a second laser beam;
- performing, by a dual-pass amplifier, dual-pass amplification of the first laser beam along a common beam path;
- performing, by the dual-pass amplifier, dual-pass amplification of the second laser beam along the common beam path;
- performing, by an acousto-optic modulator disposed along the common beam path, generating a modified first laser beam based on a first wavelength of the first laser beam;
- performing, by the acoustic modulator, generating a modified second laser beam based on a second wavelength of the second laser beam;
- performing, by the dual-pass amplifier, the dual-pass amplification of the first laser beam based on:
- a first amplification of the first laser beam;
- and
- a second amplification of the modified first laser beam;
- and
- perform, by the dual-pass amplifier, the dual-pass amplification of the second laser beam based on:
- a third amplification of the second laser beam;
- and
- a fourth amplification of the modified second laser beam.
12 more elements
Dependencies are inferred from the claim text.