Method and apparatus for positioning optical isolator assembly with replaceable motor assembly
AssigneeKLA Corporation
InventorsYaojun Xu, Rudy F. Garcia
Life of this patent
Estimating the term…
Abstract
An apparatus includes a lifting device and a motor assembly. The lifting device is disposed in a lifting device housing and is configured to adjust a vertical position of an optical component connected to the lifting device. The motor assembly is disposed in a motor housing and is configured to drive the lifting device to adjust the vertical position of the optical component. The lifting device housing, the motor housing, and the optical component are disposed in an ultra-high vacuum chamber of an enclosure. In the case of motor failure, the motor housing can be disconnected from the lifting device housing, and the motor assembly can be decoupled from the lifting device, such that the motor assembly can be replaced.
Claims12
An apparatus comprising:
- an optical component;
- an ultra-high vacuum chamber of an enclosure;
- a lifting device disposed in a lifting device housing, the lifting device being configured to adjust a vertical position of the optical component at a first connection;
- and
- a motor assembly disposed in a motor housing, the motor assembly being configured to drive the lifting device to adjust the vertical position of the optical component;
- wherein the motor housing is detachably connected to the lifting device housing, the motor assembly is detachably coupled to the lifting device, and the lifting device housing, the motor housing, and the optical component are disposed in the ultra-high vacuum chamber of the enclosure.
Dependencies are inferred from the claim text.