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US 12,444,573 B2Granted
Impedance matching network and method
AssigneeASM America, Inc.
InventorMichael Gilliam Ulrich
Life of this patent
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Abstract
In one embodiment, an impedance matching network includes variable capacitors. A first variable capacitor has a terminal electrically connected to the RF input. A second variable capacitor has a terminal electrically connected to the RF output. At least one of the variable capacitors is an electrically variable capacitor (EVC). The EVC includes a plurality of parallel-coupled capacitors comprising fine capacitors increasing in capacitance and coarse capacitors having a greater capacitance. A capacitor position for the EVC for enabling an impedance match is determined by a processor using software. An impedance match is enabled by directly switching the electronically variable capacitor to the determined capacitor position.
Claims20
An impedance matching network comprising:
- an RF input configured to operably couple to an RF source;
- an RF output configured to operably couple to a plasma chamber;
- and
- variable capacitors comprising:
- a first variable capacitor, a terminal of the first variable capacitor being electrically connected to the RF input;
- and
- a second variable capacitor separate and distinct from the first variable capacitor, a terminal of the second variable capacitor being electrically connected to the RF output;
- wherein at least one of the variable capacitors is an electrically variable capacitor that comprises:
- a plurality of capacitors operably coupled in parallel, the plurality of capacitors comprising:
- fine capacitors increasing in capacitance;
- and
- coarse capacitors having one or more capacitances, wherein each of the one or more capacitances of the coarse capacitors is greater than a greatest individual capacitance of the fine capacitors;
- and
- a plurality of switches, wherein each switch of the plurality of switches is operably coupled with a corresponding capacitor of the plurality of capacitors to switch in or out the corresponding capacitor;
- wherein each capacitor of the plurality of capacitors provides a change to a total capacitance of the electronically variable capacitor when the capacitor's corresponding switch switches in or out the capacitor;
- wherein a capacitor position for the electronically variable capacitor for enabling an impedance match is determined by a processor using software, the capacitor position indicative of which of the fine capacitors and which of the coarse capacitors to have switched in;
- and
- wherein an impedance match is enabled by directly switching the electronically variable capacitor to the determined capacitor position.
15 more elements
A method of matching impedance comprising:
- operably coupling a matching network between an RF source and a plasma chamber, the matching network comprising:
- an RF input configured to operably couple to the RF source;
- an RF output configured to operably couple to the plasma chamber;
- and
- variable capacitors comprising:
- a first variable capacitor, a terminal of the first variable capacitor being electrically connected to the RF input;
- and
- a second variable capacitor separate and distinct from the first variable capacitor, a terminal of the second variable capacitor being electrically connected to the RF output;
- wherein at least one of the variable capacitors is an electrically variable capacitor that comprises:
- a plurality of capacitors operably coupled in parallel, the plurality of capacitors comprising (a) fine capacitors increasing in capacitance;
- and (b) coarse capacitors having one or more capacitances, wherein each of the one or more capacitances of the coarse capacitors is greater than a greatest individual capacitance of the fine capacitors;
- and
- a plurality of switches, wherein each switch of the plurality of switches is operably coupled with a corresponding capacitor of the plurality of capacitors to switch in or out the corresponding capacitor;
- and
- wherein each capacitor of the plurality of capacitors provides a change to a total capacitance of the electronically variable capacitor when the capacitor's corresponding switch switches in or out the capacitor;
- determining, using software, a capacitor position for the electronically variable capacitor for enabling an impedance match, the capacitor position indicative of which of the fine capacitors and which of the coarse capacitors to have switched in;
- and
- varying the total capacitance of the electronically variable capacitor to enable an impedance match by directly switching the electronically variable capacitor to the determined capacitor position.
15 more elements
A processing tool comprising:
- a plasma chamber configured to deposit a material onto a substrate or etch a material from the substrate;
- and
- an impedance matching circuit operably coupled to the plasma chamber, matching circuit comprising:
- an RF input configured to operably couple to an RF source;
- an RF output configured to operably couple to a plasma chamber;
- and
- variable capacitors comprising:
- a first variable capacitor, a terminal of the first variable capacitor being electrically connected to the RF input;
- and
- a second variable capacitor separate and distinct from the first variable capacitor, a terminal of the second variable capacitor being electrically connected to the RF output;
- wherein at least one of the variable capacitors is an electrically variable capacitor that comprises:
- a plurality of capacitors operably coupled in parallel, the plurality of capacitors comprising:
- fine capacitors increasing in capacitance;
- and
- coarse capacitors having one or more capacitances, wherein each of the one or more capacitances of the coarse capacitors is greater than a greatest individual capacitance of the fine capacitors;
- and
- a plurality of switches, wherein each switch of the plurality of switches is operably coupled with a corresponding capacitor of the plurality of capacitors to switch in or out the corresponding capacitor;
- wherein each capacitor of the plurality of capacitors provides a change to a total capacitance of the electronically variable capacitor when the capacitor's corresponding switch switches in or out the capacitor;
- wherein a capacitor position for the electronically variable capacitor for enabling an impedance match is determined by a processor using software, the capacitor position indicative of which of the fine capacitors and which of the coarse capacitors to have switched in;
- and
- wherein an impedance match is enabled by directly switching the electronically variable capacitor to the determined capacitor position.
18 more elements
A method of manufacturing a semiconductor, the method comprising:
- operably coupling a matching network between an RF source and a plasma chamber, the plasma chamber configured to deposit a material layer onto a substrate or etch a material layer from the substrate, and the matching network comprising:
- an RF input configured to operably couple to the RF source;
- an RF output configured to operably couple to the plasma chamber;
- and
- variable capacitors comprising:
- a first variable capacitor, a terminal of the first variable capacitor being electrically connected to the RF input;
- and
- a second variable capacitor separate and distinct from the first variable capacitor, a terminal of the second variable capacitor being electrically connected to the RF output;
- wherein at least one of the variable capacitors is an electrically variable capacitor that comprises:
- a plurality of capacitors operably coupled in parallel, the plurality of capacitors comprising (a) fine capacitors increasing in capacitance;
- and (b) coarse capacitors having one or more capacitances, wherein each of the one or more capacitances of the coarse capacitors is greater than a greatest individual capacitance of the fine capacitors;
- and
- a plurality of switches, wherein each switch of the plurality of switches is operably coupled with a corresponding capacitor of the plurality of capacitors to switch in or out the corresponding capacitor;
- and
- wherein each capacitor of the plurality of capacitors provides a change to a total capacitance of the electronically variable capacitor when the capacitor's corresponding switch switches in or out the capacitor;
- placing a substrate in the plasma chamber;
- energizing plasma within the plasma chamber by coupling RF power from the RF source into the plasma chamber to perform a deposition or etching;
- determining, using software, a capacitor position for the electronically variable capacitor for enabling an impedance match, the capacitor position indicative of which of the fine capacitors and which of the coarse capacitors to have switched in;
- and
- varying the total capacitance of the electronically variable capacitor to enable an impedance match by directly switching the electronically variable capacitor to the determined capacitor position.
17 more elements
Dependencies are inferred from the claim text.