EUV collector
AssigneeCarl Zeiss SMT GmbH
InventorValentin Jonatan Bolsinger
Life of this patent
Estimating the term…
Abstract
An EUV collector has a reflection surface with a basic mirror shape of a spherical section. A diffraction grating for EUV used light is applied to the reflection surface. The diffraction grating is designed so that the EUV used light, which emanates from a sphere center of the spherical section, is diffracted by the diffraction grating toward a collection region. The collection region is spatially spaced apart from the sphere center. This creates an EUV collector in which an effective separation between EUV used light, which is to be collected with the aid of the collector, and extraneous light having a wavelength that differs from a used light wavelength is made possible.
Claims20
An EUV collector, comprising:
- a reflection surface comprising a basic mirror shape of a spherical section;
- and
- a diffraction grating supported by the reflection surface,
- wherein:
- the diffraction grating is configured so that, during use of the EUV collector, used light emanates from a sphere center of the spherical section and is diffracted by the diffraction grating toward a collection region;
- and
- the collection region is spatially spaced apart from the sphere center.
Dependencies are inferred from the claim text.