Vertical probe array having sliding contacts in elastic guide plate

A probe array for making temporary electrical contact to a device under test, the probe array comprising:

• two or more probes;
• and
• an elastic matrix configured as a sheet having at least one elastomer layer and including an array of through holes, wherein each of the two or more probes is disposed in a corresponding one of the through holes, and wherein a vertical direction is perpendicular to the elastic matrix;
• wherein each probe of the two or more probes includes a first part and a second part configured to make a sliding electrical contact with each other as the first part and the second part move with respect to each other along the vertical direction;
• wherein each probe of the two or more probes engages with the elastic matrix such that a restoring force in response to vertical probe compression is provided by the elastic matrix;
• wherein a tip to tip length of the two or more probes is between 250 μm and 750 μm, and wherein an electrical bandwidth of the two or more probes is at least 100 GHz.