Cleaning agent composition and cleaning method
AssigneeNissan Chemical Corporation
InventorsHiroshi Ogino, Tetsuya Shinjo, Ryo Karasawa, Takahisa Okuno
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Abstract
A cleaning agent composition for use in removal of a polysiloxane adhesive remaining on a substrate, the composition containing a tetrahydrocarbylammonium fluoride and an organic solvent, wherein the organic solvent contains an aromatic compound represented by formula (1) and a lactam compound represented by formula (2). (in formulas (1) and (2), s represents the number of substituents R100s of the benzene ring and is 2 or 3; s groups of R100s each independently represent a C1 to C6 alkyl group; the total number of carbon atoms in s groups of C1 to C6 alkyl groups is 3 or greater; R101 represents a C1 to C6 alkyl group; and R102 represents a C1 to C6 alkylene group.)
Claims10
A cleaning agent composition for use in removal of a polysiloxane adhesive remaining on a substrate, the composition comprising a tetrahydrocarbylammonium fluoride and an organic solvent, wherein the organic solvent comprises N-alkyl-2-pyrrolidone, and an aromatic compound represented by formula (1-1) or (1-2);
- wherein:
- each R100 represents a C1 to C6 alkyl group;
- a total number of carbon atoms in the three C1 to C6 alkyl groups of R100 in formula (1-1) is 3 or greater;
- and a total number of carbon atoms in the two C1 to C6 alkyl groups of R100 in formula (1-2) is 3 or greater, and
- the alkyl group of N-alkyl-2-pyrrolidone is a C1 to C6 alkyl group.
Dependencies are inferred from the claim text.