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US 12,441,769 B2Granted
Polypeptide, photoresist composition including the same, and method of forming pattern using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJieun Kim, Soonchun Chung, Jinha Kim, Joonsong Park
Life of this patent
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Abstract
A polypeptide including a region A, a region B, and a region C, a photoresist composition including the polypeptide, and a method of forming patterns by using the photoresist composition.
Claims17
A polypeptide consisting of a region A, a region B, a region C, and a region H, wherein the region A is disposed between the region H and the region B, wherein the region A, the region B, and the region C, are consecutively arranged, wherein
- the region A has an alanine content of 20% or more and consists of a first repeat unit having 4 to 10 consecutive amino acid residues,
- the region B has a tyrosine content of 10% or more and consists of a second repeat unit having 4 to 10 consecutive amino acid residues, and
- the region C has a content of 50-70% or more of at least one of aspartic acid or glutamic acid, and consists of a third repeat unit having 2 to 8 consecutive amino acid residues,
- the polypeptide has a weight average molecular weight of about 3,000 g/mol to about 10,000 g/mol, and
- wherein
- the first repeat unit is represented by Formula 1,
- the second repeat unit is represented by Formula 2,
- the third repeat unit repeat unit is represented by Formula 3, and
- the region H is represented by Formula 4:
- X11-(Ala-X12)n11-X13, Formula 1
- X21-(X22-X23)n21-Tyr, Formula 2
- X31-(X32-X33)n31-X34, Formula 3
- X41-(Ala-X42)n41-X43-Gly-Ala-Ala-Ser, Formula 4
- wherein in Formulae 1, 2, 3, and 4
- X11 and X12 are each independently Gly or Ala, X13 is Ser or Ala, and n11 is an integer of 1 to 4;
- X21 and X23 are each independently Gly or Ala, X22 is Gly, Ala, or Val, and n21 is an integer of 1 to 4;
- X31 to X34 are each independently Asp or Glu, and n31 is an integer of 0 to 3;
- and
- X41 and X42 are each independently Gly or Ala, X43 is Ser or Ala, and n41 is 1 or 2.
16 more elements
Dependencies are inferred from the claim text.