Silicon compounds and methods for depositing films using same

A method for making a silicon compound represented by Formula I:

• the method comprising:
• performing hydrosilylation of an alkoxysilane with an unsaturated alcohol in presence of a catalyst, followed by cyclization with or without solvent according to equation (1) or (2):
• wherein R1 is selected from the group consisting of hydrogen, a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a linear C2 to C10 alkenyl group, a branched C3 to C10 alkenyl group, a linear C2 to C10 alkynyl group, a branched C4 to C10 alkynyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 hetero-cyclic alkyl group, a C5 to C10 aryl group, and a C3 to C10 hetero-aryl group;
• R2 is a C3 to C4 alkyl di-radical which forms a five-membered, or six-membered saturated cyclic ring with the Si and oxygen atoms with C1 to C6 alkyl substituents;
• R3 is selected from the group consisting of a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a linear C2 to C10 alkenyl group, a branched C3 to C10 alkenyl group, a linear C2 to C10 alkynyl group, a branched C4 to C10 alkynyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 hetero-cyclic alkyl group, a C5 to Co aryl group, and a C3 to C10 hetero-aryl group, and alkoxy OR4 wherein R4 is selected from the group consisting of a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a linear C2 to C10 alkenyl group, a branched C3 to C10 alkenyl group, a linear C2 to C10 alkynyl group and a branched C4 to C10 alkynyl group;
• and R5-8 are independently selected from the group consisting of hydrogen, a linear C1 to C10 alkyl group and a branched C3 to C10 alkyl group with the proviso that either all of R5-8 are hydrogen, or at least one of R7-8 is not hydrogen.