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US 12,441,606 B2Granted
MEMS device including coil structure with corrugated polymer film
AssigneeUnited Microelectronics Corp.
InventorsJung-Hao Chang, Weng-Yi Chen
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Abstract
A micro electro mechanical system (MEMS) device and a method for manufacturing the same are provided. The MEMS device includes a substrate, a polymer film on the substrate and having a lower surface facing toward the substrate, a cavity passing through the substrate, and coil structures on the substrate and in the polymer film. The polymer film includes a corrugation pattern on the lower surface of the polymer film. A portion of the polymer film is exposed in the cavity.
Claims8
A micro electro mechanical system (MEMS) device, comprising:
- a substrate;
- a polymer film on the substrate and having a lower surface facing toward the substrate, wherein the polymer film comprises a corrugation pattern on the lower surface of the polymer film;
- a cavity passing through the substrate, wherein a portion of the polymer film is exposed in the cavity;
- coil structures on the substrate and in the polymer film;
- a dielectric layer between the substrate and the polymer film, wherein the cavity passes through the dielectric layer;
- and
- an oxide layer between the dielectric layer and the substrate.
4 more elements
Dependencies are inferred from the claim text.