Apparatuses for supplying chemical liquid
AssigneeSemes Co., Ltd.
InventorsJangmi Woo, Kihoon Choi, Younghoon Jeong, Myungjin Kim
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AssigneeSemes Co., Ltd.
InventorsJangmi Woo, Kihoon Choi, Younghoon Jeong, Myungjin Kim
Estimating the term…
An apparatus for supplying chemical liquid may include at least two ink jet heads, a reservoir for receiving a chemical liquid provided onto a substrate from each of the at least two ink jet heads, a chemical liquid supplying member for providing the chemical liquid to each of the at least two ink jet heads, and a chemical liquid collecting member for drawing and collecting a chemical liquid remaining in each of the at least two ink jet heads. One path of the chemical liquid from the chemical liquid supplying member to the chemical liquid collecting member via one of the at least two ink jet heads may be substantially the same as a length of another path of the chemical liquid from the chemical liquid supplying member to the chemical liquid collecting member via the other of the at least two ink jet heads.
An apparatus for supplying chemical liquid, comprising:
An apparatus for supplying chemical liquid, comprising:
An apparatus for supplying chemical liquid, comprising:
Dependencies are inferred from the claim text.