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US 12,440,971 B2Granted
Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate
AssigneeTokyo Electron Limited
InventorsTakehiro Shindo, Akira Takahashi, Takashi Horiuchi, Toshiaki Kodama
Life of this patent
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Abstract
There is provided an apparatus for transporting a substrate. The apparatus comprises: an end effector including a fork which holds the substrate and a wrist part which holds a proximal end portion of the fork; an arm provided with the end effector installed thereon and a mechanism which moves the fork; and an inclination adjusting mechanism provided between the fork and the wrist part or between the wrist part and the arm to adjust an inclination of the fork.
Claims18
An apparatus for transporting a substrate, comprising:
- an end effector including a fork which holds the substrate and a wrist part which holds a proximal end portion of the fork;
- an arm provided with the end effector installed thereon and a mechanism which moves the fork;
- and
- an inclination adjusting mechanism provided between the fork and the wrist part or between the wrist part and the arm to adjust an inclination of the fork,
- wherein the inclination adjusting mechanism includes:
- three support pins provided to support the fork or the wrist part from a lower surface side and disposed at positions at which vertices of a triangle are formed when seen in a plan view,
- a height adjusting part which changes height positions of upper ends of the three support pins relative to each other, and
- a pulling pin disposed inside the triangle to maintain a state in which the upper end of each of the support pins and the lower surface of the fork or the wrist part are in contact with each other, and installed to pull the fork toward a support pin side.
5 more elements
A method of transporting a substrate, comprising:
- a step of transporting the substrate using an apparatus for transporting a substrate including an end effector including a fork which holds the substrate and a wrist part which holds a proximal end portion of the fork, an arm provided with the end effector installed thereon and a mechanism which moves the fork, and an inclination adjusting mechanism installed between the fork and the wrist part or between the wrist part and the arm to adjust the inclination of the fork and including three support pins provided to support the fork or the wrist part from a lower surface side and disposed at positions at which vertices of a triangle are formed when seen in a plan view, a height adjusting part that changes height position of upper ends of the three support pins relative to each other, and a pulling pin disposed inside the triangle to maintain a state in which the upper end of each of the support pins and the lower surface of the fork or the wrist part are in contact with each other, and installed to pull the fork toward a support pin side.
Dependencies are inferred from the claim text.