Frequency-tunable ultrasonic device
AssigneeVermon
InventorsCyril Meynier, Dominique Gross
Life of this patent
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Abstract
An ultrasonic device, comprising an ultrasonic transducer (400) comprising: a membrane (405) suspended above a cavity (403) arranged on the upper surface side of a substrate (401); a piezoelectric layer (407) attached to a surface of the membrane (405); a first electrode (E1) arranged on the lower surface side of the cavity (403); and a second electrode (E3) arranged on the upper surface side of the cavity (403), in contact with the piezoelectric layer (407), the device further comprising a control circuit (CTRL) connected to the first (E1) and second (E3) electrodes and capable of applying a first control voltage (VDC) on the first electrode (E1), and a second control voltage (VAC) different from the first voltage on the second electrode (E3).
Claims11
An ultrasonic device, comprising an ultrasonic transducer comprising:
- a membrane suspended above a cavity arranged on the upper surface side of a substrate;
- a piezoelectric layer attached to a surface of the membrane;
- a first electrode arranged on the lower surface side of the cavity;
- and
- a second electrode arranged on the upper surface side of the cavity, in contact with the piezoelectric layer,
- the device further comprising a control circuit connected to the first electrode and the second electrode and capable of simultaneously applying a first control voltage on the first electrode, and a second control voltage different from the first voltage on the second electrode,
- wherein the control circuit is configured to, during a phase of emission of an ultrasound wave, apply a DC bias voltage on the first electrode, and apply an AC excitation voltage on the second electrode, and
- wherein the control circuit is configured to, during a phase of reception of an ultrasound wave, apply a DC bias voltage on the first electrode, and read an AC voltage generated on the second electrode under the effect of the received ultrasound wave.
Dependencies are inferred from the claim text.