Inspection device

An inspection device comprising:

• a stage having a stage surface and fixing a magnetoresistive random access memory (MRAM) element on the stage surface;
• a first electromagnet, a second electromagnet, a third electromagnet and a fourth electromagnet each includes a yoke whose end faces a predetermined area and a coil wound around yoke in the same direction, wherein an end of a yoke of the first electromagnet and an end of a yoke of the second electromagnet are oppose in an one direction, and an end of a yoke of the third electromagnet and an end of a yoke of the fourth electromagnet are oppose in a direction orthogonal to the one direction;
• an optical system illuminating the MRAM element with illumination light including polarized light, and simultaneously condensing reflected light from which the illumination light is reflected from the MRAM element;
• and
• a detector detecting the reflected light when the position of the MRAM element in magnetic fields generated in the predetermined area is changed.

An inspection device comprising:

• a stage having a stage surface and fixing a magnetoresistive random access memory (MRAM) element on the stage surface;
• a first electromagnet, a second electromagnet, a third electromagnet and a fourth electromagnet each includes a yoke whose end faces a predetermined area and a coil wound around yoke in the same direction, wherein an end of a yoke of the first electromagnet and an end of a yoke of the second electromagnet are oppose in an one direction, an end of a yoke of the third electromagnet and an end of a yoke of the fourth electromagnet are oppose in a direction orthogonal to the one direction and the first to fourth electromagnetic generate a first magnetic field in the predetermined space by applying currents in opposite direction to coils of the first and the second electromagnet and not applying currents to coils of the third and the fourth electromagnet;
• an optical system illuminating the MRAM element with illumination light including polarized light, and simultaneously condensing reflected light from which the illumination light is reflected from the MRAM element;
• a detector detecting the reflected light when the position of the MRAM element in the first magnetic field is changed;
• and
• an information processing unit performing an inspection a detect in the MRAM element by the magnetic field component in a vertical direction perpendicular to the stage surface based on images generated when the position of the MRAM element in the first magnetic field is changed.