Transport apparatus
AssigneeCanon Kabushiki Kaisha
InventorTakuma Hashizume
Life of this patent
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Abstract
A transport apparatus includes: a stator; a mover that includes a first scale and is movable along the stator in a first direction; a plurality of first detectors each of which is provided to be able to face the first scale and detects a position of the mover in a second direction crossing the first direction; and a control unit that controls position and/or attitude of the mover, the first scale and the first detector constitute an incremental encoder, wherein the plurality of first detectors are arranged at a predetermined interval along the first direction in the stator, and the control unit corrects position information of the mover by a detection value of one of the first detectors based on position information of the mover by a detection value of another of the first detectors.
Claims11
A transport apparatus comprising:
- a stator;
- a mover that includes a first scale and is movable along the stator in a first direction;
- a plurality of first detectors provided facing said first scale, wherein a position of the mover in a second direction intersecting the first direction is detected by at least two first detectors of the plurality of first detectors, the at least two first detectors facing the first scale by movement of the mover;
- and
- a control unit that controls position and/or attitude of the mover,
- wherein the first scale and the plurality of first detectors constitute an incremental encoder,
- wherein the plurality of first detectors are arranged at a predetermined interval along the first direction in the stator, and
- wherein, when one first detector of the plurality of the first detectors starts detecting the first scale by movement of the mover, the control unit corrects a detection value of the one first detector with a detection value of another one of the first detectors that has already detected the first scale.
A control method of a transport apparatus comprising:
- a stator, a mover that includes a first scale and is movable along the stator in a first direction, and a plurality of first detectors facing said first scale, wherein a position of the mover in a second direction intersecting the first direction is detected by at least two first detectors of the plurality of first detectors, the at least two first detectors facing the first scale by movement of the mover, wherein the first scale and the plurality of first detectors constitute an incremental encoder, and wherein the plurality of first detectors are arranged at a predetermined interval along the first direction in the stator, the control method comprising:
- when one first detector of the plurality of the first detectors starts detecting the first scale by movement of the mover, correcting a detection value of the one first detector with a detection value of another first detector that has already detected the first scale.
Dependencies are inferred from the claim text.