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US 12,438,075 B2Granted
Method for manufacturing a laminated body
AssigneeCanon Anelva Corporation
InventorsHiroshi Yakushiji, Reiji Sakamoto, Masahiro Shibamoto
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Abstract
Provided are a laminated body and a laminated body manufacturing method that can improve adhesiveness between a resin layer and a seed layer. The laminated body has a substrate, a first wiring layer, a resin layer, and a second wiring layer in this order, and the second wiring layer includes at least an adhesive layer and a seed layer in this order.
Claims9
A laminated body manufacturing method comprising:
- a first step of forming a titanium film on a resin layer;
- after the first step, a second step of forming a titanium carbide layer, as a part of an adhesive layer, on the resin layer by applying energy to the titanium film;
- after the second step, a third step of forming a titanium layer as another part of the adhesive layer on the titanium carbide layer;
- and
- after the third step, a fourth step of forming a seed layer on the titanium layer,
- wherein the titanium carbide layer is a layer formed with titanium from the titanium film and carbon from the resin layer, which are covalently bonded by applying the energy in a state where the titanium film is formed on the resin layer.
3 more elements
Dependencies are inferred from the claim text.