Ultrasound vibrating-type defect detection apparatus and wire defect detection system

A wire defect detection system for detecting a defect in a wire of a semiconductor apparatus, which comprises a substrate, a semiconductor element attached to the substrate, and the wire connecting an electrode of the semiconductor element and an electrode of the substrate, or one electrode of the semiconductor element and another electrode of the semiconductor element, the wire defect detection system comprising:

• an ultrasound vibrating device ultrasonically vibrating the semiconductor apparatus;
• a power supply supplying high-frequency power to the ultrasound vibrating device;
• an imaging device imaging the semiconductor apparatus ultrasonically vibrated;
• a display displaying an image captured by the imaging device;
• and
• a controller adjusting a frequency of the high-frequency power supplied from the power supply to the ultrasound vibrating device and performing detection of a defect in the wire,
• wherein the controller captures a video of the semiconductor apparatus with the imaging device while varying the frequency of the high-frequency power supplied from the power supply to the ultrasound vibrating device,
• calculates a difference between images in one frame of the video captured and a previous frame before the one frame, and
• displays a display image of the wire on the display by differentiating the display image from other display images of the wire in response to the difference exceeding a predetermined threshold,
• the semiconductor apparatus comprises a target portion subjected to detection of a defect, and a non-target portion not subjected to detection of a defect, and
• the controller adjusts a voltage of the high-frequency power supplied from the power supply to the ultrasound vibrating device so that a ratio of an amplitude of the target portion detected from the image captured by the imaging device to an amplitude of the non-target portion detected from the image captured by the imaging device is equal to or greater than a predetermined value when varying the frequency of the high-frequency power supplied from the power supply to the ultrasound vibrating device.