Method of fabricating metal mask
AssigneeDarwin Precisions Corporation
InventorsYun-Pei Yang, Jen-Shun Lin, Yu-Wei Chang
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AssigneeDarwin Precisions Corporation
InventorsYun-Pei Yang, Jen-Shun Lin, Yu-Wei Chang
Estimating the term…
A method of fabricating a metal mask includes receiving a conductive substrate with a first surface, a second surface opposite to the first surface, a third surface connecting the first and second surfaces, and a fourth surface opposite to the third surface and connecting the first and second surfaces. The method further includes forming trenches in a direction from the first surface to the second surface and protrusions in the conductive substrate. The trenches and the protrusions are alternately arranged. The method further includes filling the trenches with an insulation material covering a first area of the protrusions, forming a metal layer on the conductive substrate overlying a second area different from the first area of the protrusions, removing the insulation material, and removing the conductive substrate. The metal layer becomes a metal mask with a three-dimensional structure including strip-shaped structures.
A method of fabricating a metal mask, comprising:
Dependencies are inferred from the claim text.